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Vacuum Vapor Phase Cleaning Machine-NanoVapor
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NanoVapor is designed for precision cleaning of electronic assemblies and components with complex structures. It is especially suitable for parts with narrow gaps and low stand-off areas, such as BGA, flip-chip, and 3D IC packages, where conventional aqueous cleaning may have difficulty reaching the hidden surfaces.


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Cleaning Applications Equipment Features
Cleaning Applications

NanoVapor adopts a vacuum vapor phase cleaning process, which helps the solvent penetrate into narrow gaps, blind areas, and other hard-to-clean structures more effectively. The machine is equipped with an integrated distillation unit, allowing clean solvent to be continuously prepared during operation and helping maintain stable cleaning performance.


Typical Applications


  • BGA packages
  • Flip-chip assemblies
  • 3D IC packages
  • Low stand-off components
  • Precision electronic assemblies
Equipment Features

The system is designed for closed-loop solvent use, which helps reduce solvent loss and improve process stability. A computer and touchscreen control interface allows operators to set process parameters, monitor running status, and manage production data more conveniently.


  • Under vacuum conditions (p<50 mbar), the entire cycle is completed above the flash point (62 - 80°C).
  • Continuous distillation is adjustable based on the solvent.
  • Perfect low-vacuum drying.
  • Equipped with a precise filtering spray system to remove particles (25μm; optional 1 or 5μm).
  • Robust safety systems ensure high reliability of operation.
  • All cleaning processes are completed under vacuum conditions.
  • Excellent cleaning and drying results, even for complex-shaped parts such as blind holes or small, long drill holes.
  • No discharge, with minimal solvent loss in closed-loop operation.
  • The entire set of pipelines and tanks are made of 304 stainless steel.
  • Optimized arrangement of tanks and distillation pipes for a compact design.
  • Standardly equipped with two solvent storage tanks and one distillation tank


Why NanoVapor


NanoVapor is a practical choice for manufacturers who need a stable cleaning process for high-density and high-reliability electronic products. It combines vacuum vapor cleaning, continuous solvent preparation, and convenient process control in one system.

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